Internet Archive Scholar

Measured Propagation Characteristics of Finite Ground Coplanar Waveguide on Silicon with a Thick Polyimide Interface Layer

George E. Ponchak, Edan Dalton, Andrew Bacon, John Papapolymerou, Emmanouil M. Tentzeris
2002 2002 32nd European Microwave Conference  

Preserved Fulltext

fulltext thumbnail
Web Archive Capture PDF (300.6 kB)
https://web.archive.org/web/20180726083944/https://ntrs.nasa.gov/archive/nasa/casi.ntrs.nasa.gov/20020073074.pdf

A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2018; you can also visit the original URL. The file type is application/pdf.

Measured propagation characteristics of Finite Ground Coplanar (FGC) waveguide on silicon substrates with resistivities spanning 3 orders of magnitude (0.1 to 15.5 Ohm cm) and a 20 I.tm thick polyimide interface layer is presented as a function of the FGC geometry. Results show that there is an optimum FGC geometry for minimum loss, and silicon with a resistivity of 0.1 Ohm cm has greater loss than substrates with higher and lower resistivity. Lastly, substrates with a resistivity of 10 Ohm cm or greater have acceptable loss.
doi:10.1109/euma.2002.339253 fatcat:cxslz6373jfr5mzoxtfldhwgzy
Citation

George E. Ponchak, Edan Dalton, Andrew Bacon, John Papapolymerou, Emmanouil M. Tentzeris. "Measured Propagation Characteristics of Finite Ground Coplanar Waveguide on Silicon with a Thick Polyimide Interface Layer." 2002 32nd European Microwave Conference (2002)