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Mechanisms of stress generation and relaxation in thin films and coatings
The failure modes of thin metal films and ceramic coatings induced by both intrinsic (growth) stresses and external effects (uniaxial tension, alternating bending, thermal treatment) were studied. Stress relaxation that causes soft films and hard coatings to fail was demonstrated to be governed by essentially the same mechanisms. The primary factor governing the reliability of thin-film structures was shown to be the strength of the film/substrate interface.doi:10.1063/1.4899010 fatcat:6yl4hysysrgs5oxa3rfvqhrtly