Hydrophobic porous metallic membranes can be integrated in a microreactor for in situ separation of steam at high temperatures. This study investigates the fabrication and characterization of hydrophobic coatings on metallic substrates. Two different coating methods were explored: (1) Plasma Enhanced—Chemical Vapor Deposition (PE-CVD) to form amorphous carbon silicon-doped a-C:H:Si:O thin films and (2) Direct Immersion in fluoroalkyl silane (FAS-13) solution using dip coating to form

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... led Monolayers. The results on wettability as well as SEM images and EDS/WDS analyses indicate that the coated sintered stainless steel membranes are adequate as hydrophobic surfaces, maintaining the porosity of the substrate and withstanding high temperatures. Especially the FAS-13 coating shows very good resistance to temperatures higher than 250 °C. These findings are of special significance for the fabrication of porous metal membranes for separation of steam in high temperature applications.