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Interferometric step gauge for CMM verification
Measurement science and technology
High accuracy step gauge interferometer V Byman, T Jaakkola, I Palosuo et al. -Interferometric 30 m bench for calibrations of 1D scales and optical distance measuring instruments J Unkuri, A Rantanen, J Manninen et al. -MIKES fibre-coupled differential dynamic line scale interferometer Antti Lassila -This content was downloaded from IP address 22.214.171.124 on 02/05 Abstract The verification of the measurement capability of coordinate measuring machines (CMM) is usually performed using gaugedoi:10.1088/1361-6501/aabd2b fatcat:tdgwcmhpkngbfm4hnrrseojrfy