A Multi-Layer Stacked All Sol-Gel Fabrication Technique for Vertical Coupled Waveguide

Ahmad Syahrin Idris, Sampad Ghosh, Kiichi Hamamoto
2017 Evergreen  
A multi-layer vertically stacked all sol-gel fabrication technique on bulk silicon is proposed to realize vertical coupling from planar waveguides to 3-dimensional structures. The all sol-gel fabrication technique realizes the capability to stack ZnO sol-gel core layer and SiO2 sol-gel cladding and core separation layers. A major issue with sol-gel based fabrication is the appearance of cracks on the sol-gel layer, and these were improved by a slow cooling process of 1°C/min after 500°C
more » ... ure annealing in addition to a SiO2 surface cleaning using photoresist remover. As a result, a multi-layer vertically stacked structure with a ZnO core layer thickness of 300 nm and SiO2 cladding/core separation layer thickness of 1.5 µm was successfully fabricated on bulk Si.
doi:10.5109/1929657 fatcat:kq5fxmdv5na37a2y2zfcdvplfa