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Integration of Graphene on AlN Based High Frequency Resonators and Their Functionalization for Biosensing
2017
Proceedings (MDPI)
We present the successful integration of graphene on top of AlN-based solidly mounted resonators (SMRs), using a low temperature CVD process and Ni layers as catalyst. We develop a protocol to functionalize the surface of the resonators that starts with a low damage O2 radical plasma treatment of the surface of the devices that introduces a controlled density of defects on the graphene. Then, EDC/NHS chemistry is used to covalently bond streptavidin molecules to the surface of the sensors.
doi:10.3390/proceedings1040539
fatcat:72utfzrd2zgqth5r4xjse2cyce