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Deposition and Characteristics of Chlorine-Doped Glow Discharge Polymer Films
1997
Fusion Technology
Preserved Fulltext
Shells coated with chlorine-doped polymers deposited in a plasma are needed for diagnostic purposes for the OMEGA experiment. We have deposited chlorine-doped plasma polymer films by using a number of different chlorinated hydrocarbons. Chlorine concentrations between ≤ 1 to ≈ 35 at.% were obtained. Several characteristics of Cl-GDP films such as color, stress, chlorine concentration homogeneity and thermal stability are discussed.
doi:10.13182/fst97-a30797
fatcat:tmx42rjw6faafivwpfxezah7za