Formation of ZnO memristor structures by scratching probe nanolithography

R V Tominov, V A Smirnov, V I Avilov, A A Fedotov, V S Klimin, N E Chernenko
2018 IOP Conference Series: Materials Science and Engineering  
This work presents the results of the formation and investigation of Al2O3/ZnO:In/ZnO/Ti memristor structures. It is shown that using Ti layer can improve memristive effect. Resistive switching from high resistance state (HRS) to low resistance state (LRS) occurred at 2.1±0.3 V, and from LRS to HRS at -1.5±0.3 V. Endurance test showed that HRS was 5.51±0.13 GΩ and LRS was 0.25±0.05 GΩ. HRS/LRS coefficient equalled to 22. The results can be useful for micro-and nanoelectronics elements
more » ... ing, as well as microand nanosystem engineering using probe nanotechnologies and for ZnO-based RRAM fabrication.
doi:10.1088/1757-899x/443/1/012036 fatcat:3jvsaelqxza3xb3ejgfhntfbm4