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2009 IEEE International Ultrasonics Symposium
This paper provides the theoretical modeling, simulation, and quantitative comparison that explore the design space of PZT-only (Lead Zirconate Titanate) and PZT-on 3, 5 and 10 µm single-crystal silicon high-overtone width-extensional mode (WEM) resonators with identical lateral dimensions for incorporation into radio frequency microelectromechanical systems (RF MEMS) filters and oscillators. A novel fabrication technique was developed to fabricate the resonators with and without silicon layerdoi:10.1109/ultsym.2009.5441468 fatcat:4kb3s6h3cvcxphj7q4rlxadake