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The surface energy band diagrams and the electron affinity of hydrogen-terminated and oxygen-terminated highly phosphorous-doped single crystal diamond (111) surfaces have been studied by ultraviolet photoelectron spectroscopy, secondary electron spectroscopy, X-ray photoelectron spectroscopy and photoemission electron microspectroscopy. A hydrogen-terminated boron-doped diamond (001) surface was used as a reference of surface energy band diagram. The electron affinity of the H-terminateddoi:10.1380/ejssnt.2007.33 fatcat:gwk4rc4vnjaxfevk3gonernngq