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Results in Physics
This paper reports a gas pressure sensor using surface acoustic wave resonator (SAWR) based on both the fieldinduced electron emission and the micro-corona-discharging (MCD) phenomena. With the micron-scale fingergap of electrodes covered with SiO2 passivation layer, the enhanced field-effect emission (FEE) at electrodes result in the micro-corona-discharging and thus the change in the dynamic resistance of SAWR. A high Q-factor SAWR was fabricated on ST-cut quartz substrate usingdoi:10.1016/j.rinp.2021.104221 fatcat:p3oo3oivq5hrpbrttudgqsdxqi