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Novel chemically amplified dry-developing imaging materials for high resolution microlithography

J.M.J. Frchet, J. Fahey, S. M. Lee, S. Matuszczak, Y. Shacham-Diamand, S.A. MacDonald, C.G. Willson
1992 Journal of Photopolymer Science and Technology (Fotoporima Konwakai shi)  

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doi:10.2494/photopolymer.5.17 fatcat:tsafu6bdijhjzfdjhrgyuhe6ky
Citation

J.M.J. Frchet, J. Fahey, S. M. Lee, S. Matuszczak, Y. Shacham-Diamand, S.A. MacDonald, C.G. Willson. "Novel chemically amplified dry-developing imaging materials for high resolution microlithography." Journal of Photopolymer Science and Technology (Fotoporima Konwakai shi) 5.1 (1992) 17-29