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Supplementary document for Fifth-order intrinsic aberration calculation method for soft X-ray and vacuum ultraviolet optical system - 5151780.pdf
2021
figshare.com
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This supplemental document gives the relationship between the wave aberration coefficient expressions with aperture-ray coordinates on the reference exit wavefront and the ones on the optical surface.
doi:10.6084/m9.figshare.14248958.v2
fatcat:7hsdrtdgezgyxdcz7qum7ksg3m