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Self-Crack-Healing Behavior of SiNx/SiCy Nano-Laminated Thin Film under High Temperature Environment
高温環境下におけるSiNx/SiCyナノ積層薄膜の自己き裂治癒挙動
2013
Journal of the Society of Materials Science Japan
高温環境下におけるSiNx/SiCyナノ積層薄膜の自己き裂治癒挙動
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