Preparation of Lithium Tantalate Thin Films by Wet Process and Its Application to a Moisture-Sensitive Device
タンタル酸リチウム薄膜の湿式作製とその感湿素子としての利用

Fumio IMOTO, Tsutomu NANATAKI, Katsuyuki SHIOZAKI, Hitoshi IWAMOTO, Tatsuo YAMAMOTO
1987 Journal of the Ceramic Association Japan  
doi:10.2109/jcersj1950.95.1101_520 fatcat:vvjwnn2eivfqbgzyesnovpmoca