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Production of VHF driven microplasmas and its application to micro total analysis systems
VHF駆動によるマイクロプラズマの生成技術とマイクロ化学分析システムへの応用
2001
Oyobuturi
VHF駆動によるマイクロプラズマの生成技術とマイクロ化学分析システムへの応用
Preserved Fulltext
Production of VHF driven microplasmas and its application to micro total analysis systems. Takanori ICHIKI* and Yasuhiro HORIIKE**.
doi:10.11470/oubutsu1932.70.452
fatcat:irhtmlotpbft7avjt6dl6qg4gu