Two-dimensional nanolithography using atom interferometry

A. Gangat, P. Pradhan, G. Pati, M. S. Shahriar
2005 Physical Review A. Atomic, Molecular, and Optical Physics  
We propose a novel scheme for the lithography of arbitrary, two-dimensional nanostructures via matter-wave interference. The required quantum control is provided by a pi/2-pi-pi/2 atom interferometer with an integrated atom lens system. The lens system is developed such that it allows simultaneous control over atomic wave-packet spatial extent, trajectory, and phase signature. We demonstrate arbitrary pattern formations with two-dimensional 87Rb wavepackets through numerical simulations of the
more » ... cheme in a practical parameter space. Prospects for experimental realizations of the lithography scheme are also discussed.
doi:10.1103/physreva.71.043606 fatcat:ndu6vhu3dfhhziffmtlpm2psqu