A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2019; you can also visit the original URL.
The file type is application/pdf
.
Surface Integrity of TiC Thin Film Produced by RF Magnetron Sputtering
2019
Procedia Manufacturing
Surface structure determines the performance of materials in service. Enhancing the surface topography of materials with a refractory ceramic coating such as Titanium carbide has gained unprecedented development of recent due to the increase in applications of these functionally graded materials. Radio frequency (RF) magnetron sputtering exhibits a lot of potential in depositing and growing thin film thin. One of the major advantages of RF magnetron sputtering is the ability to be used to coat
doi:10.1016/j.promfg.2019.06.040
fatcat:6a5onbax5vh5fd7idpl7fisr54