Interdigital sensors and transducers

A.V. Mamishev, K. Sundara-Rajan, Fumin Yang, Yanqing Du, M. Zahn
2004 Proceedings of the IEEE  
This review paper focuses on interdigital electrodes-a geometric structure encountered in a wide variety of sensor and transducer designs. Physical and chemical principles behind the operation of these devices vary so much across different fields of science and technology that the common features present in all devices are often overlooked. This paper attempts to bring under one umbrella capacitive, inductive, dielectric, piezoacoustic, chemical, biological, and microelectromechanical
more » ... al sensors and transducers. The paper also provides historical perspective, discusses fabrication techniques, modeling of sensor parameters, application examples, and directions of future research. be used for consumer electronics and in telecommunications. SAW devices have been made to meet the needs of acoustic filter technology [6], [14] and later spanned fields of communication, signal processing, chemical sensing, nondestructive evaluation, and biomedical applications. Extensive reviews of acoustic sensor technology have been written [15] , [16] and somewhat reduce the need for the acoustic sensor technology coverage in this paper.
doi:10.1109/jproc.2004.826603 fatcat:g6hntvcfd5e63bmhg3brzowkfy