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Interdigital sensors and transducers
2004
Proceedings of the IEEE
This review paper focuses on interdigital electrodes-a geometric structure encountered in a wide variety of sensor and transducer designs. Physical and chemical principles behind the operation of these devices vary so much across different fields of science and technology that the common features present in all devices are often overlooked. This paper attempts to bring under one umbrella capacitive, inductive, dielectric, piezoacoustic, chemical, biological, and microelectromechanical
doi:10.1109/jproc.2004.826603
fatcat:g6hntvcfd5e63bmhg3brzowkfy