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Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots
A new concept micro vibratory rate gyroscope supported by fish hook shape springs, where the oscillating position sensing and force balancing take place on the wafer surface, has been developed. The gyroscope consists of: a grid-type planar mass; LT shape position sense electrodes for detecting the Coriolis motion; pairs of force-balancing electrodes to improve the linearity and dynamic range; prominence shape comb-drive electrodes to improve the resolution by increasing the oscillatingdoi:10.1109/memsys.1997.581909 fatcat:d3drt25m7fbvzoekonvzq53u2e