A Micromachined Variable Capacitor for Monolithic Low-Noice VCOS

D.J. Young, B.E. Boser
1996 1996 Solid-State, Actuators, and Microsystems Workshop Technical Digest   unpublished
An aluminum micromachined variable capacitor is proposed as the tuning element in voltage-controlled oscillators (VCOs) in applications such as cellular phones. Compared to the traditional solutions relying on varactor diodes, this approach is amenable to monolithic integration in a standard electronic circuit process with out sacrifi cing performance. An experimental device consisting of four parallel microstructures is tunable between 2.11 pF and 2.46pF with a 5.5V DC tuning voltage. At 1GHz,
more » ... the quality factor (Q) is 62, limited by the resistive loss in the interconnect traces.
doi:10.31438/trf.hh1996.20 fatcat:ajgo6qenf5b7dbsrlnthjc3ghi