Conditional Optimization of Solution Combustion Synthesis for Pioneered La2O3 Nanostructures to Application as Future CMOS and NVMS Generations

Amanullakhan A. Pathan, Kavita R. Desai, Shailesh Vajapara, C. P. Bhasin
2018 Advances in Nanoparticles  
The Present Research paper discuses the synthesis and characterization of lanthanum oxide (La 2 O 3 ) nanoparticles by using a very low cost Solution Combustion Method. We are using Acetamide as fuel in present method. In future, most of manufacturer of integrated circuits recently announced and introduced hafnium and lanthanum based high-κ dielectrics materials in their next CMOS generations and also Lanthanum oxides show some important applications such as luminescent devices, sensors,
more » ... es, sensors, up-conversion materials, and catalytic fields. Now a day's researches are focuses on "higher-κ" materials with a dielectric constant of above 30 in order to satisfy the demands for future CMOS applications. FTIR spectroscopy was done for observing the presence of La-O bond. The synthesized lanthanum oxide nanoparticles were characterized by X-ray diffraction (XRD), Scanning Electron Microscopy (SEM) with EDAX spectra and Transmission Electron Microscopy (TEM) for morphological, percentage of metal and particle size determination. In XRD analysis, the average particle size was shown near 42 nm. Thermals analysis was done by TGA-DSC analyzer.
doi:10.4236/anp.2018.71003 fatcat:x6o5hs4f45cpbjssjugqzggjjy