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The atmospheric pressure plasma treatment on plasma polymer thin films was investigated to control the immobilization of DNA alignment. The amine groups of aminopropyltriethoxysilane have been generally used for the fixation of DNA on the substrate. However, it is easily influenced by humidity, and so it is hard to control precisely the formation of the self-assembled monolayer. The plasma polymer thin films with the atmospheric pressure plasma treatment are expected to be hardly influenced bydoi:10.7567/jjap.51.08he04 fatcat:mgjbi44naraklidrv6qmsdmrly