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Strain-Mediated Substrate Effect on the Dielectric and Ferroelectric Response of Potassium Sodium Niobate Thin Films
If piezoelectric thin films sensors based on K0.5Na0.5NbO3 (KNN) are to achieve commercialization, it is critical to optimize the film performance using low-cost scalable processing and substrates. Here, sol–gel derived KNN thin films are deposited using a solution with 5% of potassium excess on Pt/TiO2/SiO2/Si and Pt/SrTiO3 substrates, and rapid thermal annealed at 750 °C for 5 min. Despite an identical film morphology and thickness of ~335 nm, an in-plane stress/strain state is found to bedoi:10.3390/coatings8120449 fatcat:gidmd7wsmbdelaq5jhpshrmdjm