If piezoelectric thin films sensors based on K0.5Na0.5NbO3 (KNN) are to achieve commercialization, it is critical to optimize the film performance using low-cost scalable processing and substrates. Here, sol–gel derived KNN thin films are deposited using a solution with 5% of potassium excess on Pt/TiO2/SiO2/Si and Pt/SrTiO3 substrates, and rapid thermal annealed at 750 °C for 5 min. Despite an identical film morphology and thickness of ~335 nm, an in-plane stress/strain state is found to be

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... sile for KNN films on Pt/TiO2/SiO2/Si, and compressive for those on Pt/SrTiO3 substrates, being related to thermal expansion mismatch between the substrate and the film. Correspondingly, KNN films under in-plane compressive stress possess superior dielectric permittivity and polarization in the parallel-plate-capacitor geometry.