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Parallel-resonator HF micromechanical bandpass filters
Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)
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High frequency, fourth-order, micromechanical bandpass filters, with tunable frequency and bandwidth, and filter Q's in the thousands, are demonstrated in a polysilicon surface micromachining technology. These filters utilize a parallel-resonator architecture, in which properly phased outputs from two or more micromechanical resonators are combined to yield a desired filter spectrum. Design formulas are given for Butterworth, Chebyshev, and Bessel filters, and each of these filter types are
doi:10.1109/sensor.1997.635411
fatcat:z3okralg2bbnxpqe3fig4dtvp4