High Resolution Low kV SEM EDS – Breaking Convention with Low Working Distance EDS

Samuel Marks, Sharhid Jabar, Geoff West, Simon Burgess
2020 Microscopy and Microanalysis  
Energy dispersive X-ray spectroscopy (EDS) is a well-established technique analysing characteristic Xrays generated as a by-product from the electron beam interaction within a scanning electron microscope (SEM). The conventional approach to EDS combines large area silicon drift detectors (SDD) with high working distances, typically 10 -15 mm, to maximise the number of X-rays being detected. The working distance is derived from the microscope set up, specifically the geometry of the detector,
more » ... of the detector, and is required to perform accurate quantitative analysis [1] . This results in a loss of surface sensitivity due to the large interaction, generated by high energy electrons penetrating deep into a material.
doi:10.1017/s1431927620020681 fatcat:tif6vr4eezbftpnch4f3uq5acy