Molecular beam epitaxy effusion cell [article]

Terry J. Mattord, Austin, The University Of Texas At, Austin, The University Of Texas At
A molecular beam epitaxy effusion cell for growing epitaxial layers upon a semiconductor substrate by control of a collimated beam of molecules generated from a source material in a high vacuum environment in order to control the hyper abrupt stoichiometry of the effusion flux. A heated control assembly is used to control the size of the exit openings of the effusion cell. The control assembly comprises a boroelectric heating member such as a grating having a plurality of holes and a perforated
more » ... cover which are adjustable relative to one another. The grating includes an internal heating element.
doi:10.26153/tsw/4319 fatcat:jedi3vq7pbebtlojv5purmxbym