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Molecular beam epitaxy effusion cell
[article]
2019
A molecular beam epitaxy effusion cell for growing epitaxial layers upon a semiconductor substrate by control of a collimated beam of molecules generated from a source material in a high vacuum environment in order to control the hyper abrupt stoichiometry of the effusion flux. A heated control assembly is used to control the size of the exit openings of the effusion cell. The control assembly comprises a boroelectric heating member such as a grating having a plurality of holes and a perforated
doi:10.26153/tsw/4319
fatcat:jedi3vq7pbebtlojv5purmxbym