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3D-form metrology of arbitrary optical surfaces by absorption in fluids
2013
Optifab 2013
We present an imaging technique for the 3D-form metrology of optical surfaces. It is based on the optical absorption in fluids situated between the surface and a reference. An improved setup with a bi-chromatic light source is fundamental to obtain reliable topographic maps. It is able to measure any surface finish (rough or polished), form and slope and independently of scale. We present results focused on flat and spherical optical surfaces, arrays of lenses and with different surface finish
doi:10.1117/12.2030508
fatcat:csisxfezlrdphm2lho74p4vhem