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Simple and direct determination of complex refractive index and thickness of unsupported or embedded thin films by combined reflection and transmission ellipsometry at 45° angle of incidence
1983
Journal of the Optical Society of America
Measurements of the polarization states (represented by complex numbers χ r and χ t , respectively) of light reflect ed and transmitted by an unsupported or embedded thin film, for totally polarized light (with nonzero p and s com ponents) incident at 45°, permit simple, direct, and explicit determination of the film's complex refractive index N 1 independently of film thickness or input polarization. If a = χ r /χ t , we find that a = r s + r s -1 , where r s is Fresnel's complex reflection
doi:10.1364/josa.73.001080
fatcat:llcjukx2vzg3zcgxeoy7jia6by