Fabrication of YBaCuO junctions by the irradiation of focused ion beam

H. Shiga, Y. Soutome, Y. Okabe
1999 IEEE transactions on applied superconductivity  
| We have fabricated Josephson junctions in YBa 2 Cu 3 O 70 (YBaCuO) thin lms by the irradiation of focused ion beam (FIB). We used Be 2+ ions with the energy of 200 keV. When the uence of Be 2+ ions was 1.2210 16 ions/cm 2 , the I{V characteristics of the junctions at 4.2 K showed RSJ-like characteristics with the excess current. The IcRn product of the junctions was 1.1 mV at 6.3 K. Shapiro steps up to 20th step could be observed by the irradiation of 8.47 GHz microwave at 6.3 K. The magnetic
more » ... modulation curve of the junction at 4.2 K was similar to the Fraunhofer pattern. These characteristics remained unaltered after preservation in a desiccator for 6 months.
doi:10.1109/77.783633 fatcat:6lztyptosvdhfomgn5ywnvswxe