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TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference
Non-contact temperature measurements of MEMS structures using CdSe quantum dots (QDs) have been successfully demonstrated for a 1mm-long, 40μm-wide aluminum micro heater. Single quantum dot wavelength shift with respect to temperature was first characterized in the 25~65 o C as 0.24nm/ o C. Temperature profiles under different input power are evaluated based on the spectrum shift of bulk quantum dots on the heater and compared with a one-dimensional electrothermal model. Both experiments anddoi:10.1109/sensor.2007.4300397 fatcat:5yoz57ioqnhrhb7ccg3iikac2i