MEMS Temperature Characterization by CdSe Quantum Dots

Sha Li, Kai Zhang, Jui-Ming Yang, Liwei Lin, Haw Yang
2007 TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference  
Non-contact temperature measurements of MEMS structures using CdSe quantum dots (QDs) have been successfully demonstrated for a 1mm-long, 40μm-wide aluminum micro heater. Single quantum dot wavelength shift with respect to temperature was first characterized in the 25~65 o C as 0.24nm/ o C. Temperature profiles under different input power are evaluated based on the spectrum shift of bulk quantum dots on the heater and compared with a one-dimensional electrothermal model. Both experiments and
more » ... experiments and simulations are consistent with variations of less than 0.8 o C over the entire length of the heater. The theoretical spatial resolution of this technique can go down to the size of a quantum dot for non-contact temperature characterizations of micro/nano structures, including biological samples.
doi:10.1109/sensor.2007.4300397 fatcat:5yoz57ioqnhrhb7ccg3iikac2i