Effects of Bias Voltage on Fen Films Prepared by Magnetron Sputtering

Yuqiao Zeng, Zheng Tan, Lichu Zhou, Meiya Jiang, Yuedong Qiu, Feng Fang, Haibo Huang, Xuhai Zhang, Jianqing Jiang
2015 Materials Research  
doi:10.1590/1516-1439.334614 fatcat:sky46sov5vaujmi7yukvphezsa