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Growth of graphene by plasma-enhanced chemical vapor deposition and ellipsometric monitoring of first stages
プラズマCVDによるグラフェンの成長と初期過程の偏光解析モニタリング

Yasuaki Hayashi, Akito Nonomura, Kansei Kawakami, Akio Sanpei, Haruhisa Nakano, Naoki Tsukahara, Hirohiko Murakami
2019 Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science  

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doi:10.14886/jvss.2019.0_1ca08 fatcat:d4e7ac5ourc25i5sy5weea6nr4
lang:ja
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Yasuaki Hayashi, Akito Nonomura, Kansei Kawakami, Akio Sanpei, Haruhisa Nakano, Naoki Tsukahara, Hirohiko Murakami. "Growth of graphene by plasma-enhanced chemical vapor deposition and ellipsometric monitoring of first stages." Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science 2019.0 (2019) 1Ca08