Developing an Instrument Ensuring Reliable Contact Conditions for Contact-Type Area-varying Capacitive Displacement Sensors
접촉식 면적변화형 정전용량 변위센서의 접촉 안정성을 위한 기구의 개발

Sung-Joo Kim, Won-Goo Lee, Won-Kyu Moon
2011 Transactions of the Korean Society of Mechanical Engineers B  
A contact-type area-varying capacitive displacement sensor, or CLECDiS, can measure displacements over millimeter ranges with nanometer resolution. However, a small changes in the contact condition due to the surface profile or friction, which are inherent characteristics of contact-type sensors, lead to significant distortion of the output signal. Therefore, ensuring reliable contact conditions during CLECDiS measurements is the most important area to be improved in their actual use. Herein,
more » ... tual use. Herein, in order to design an instrument for ensuring reliable contact conditions, the contact condition is analyzed by characterizing the signal distortion, observing the pressure distribution between the contacting surfaces, and measuring the motional errors of the sensor using a laser Doppler vibrometer (LDV). The manufactured instrument enables a CLECDiS to be used in an ultraprecise positioning system with improved reliability. § 이 논문은 2011 년도 대한기계학회 마이크로/나노공학 부문 춘계학술대회(2011. 5. 26.-27., BEXCO) 발표논문임 † Corresponding Author, wkmoon@postech.ac.kr
doi:10.3795/ksme-b.2011.35.11.1147 fatcat:go75u554y5dhhdkd7gttjd4q6q