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Developing an Instrument Ensuring Reliable Contact Conditions for Contact-Type Area-varying Capacitive Displacement Sensors
접촉식 면적변화형 정전용량 변위센서의 접촉 안정성을 위한 기구의 개발
2011
Transactions of the Korean Society of Mechanical Engineers B
접촉식 면적변화형 정전용량 변위센서의 접촉 안정성을 위한 기구의 개발
A contact-type area-varying capacitive displacement sensor, or CLECDiS, can measure displacements over millimeter ranges with nanometer resolution. However, a small changes in the contact condition due to the surface profile or friction, which are inherent characteristics of contact-type sensors, lead to significant distortion of the output signal. Therefore, ensuring reliable contact conditions during CLECDiS measurements is the most important area to be improved in their actual use. Herein,
doi:10.3795/ksme-b.2011.35.11.1147
fatcat:go75u554y5dhhdkd7gttjd4q6q