Pumping mechanisms in sputter-ion pumps low pressure operation

K.M. Welch
Conference Record of the 1991 IEEE Particle Accelerator Conference  
It is shown that significant Hz pumping occurs in the walls of triode pumps. Also, Hz is pumped in the anode cells of sputter-ion pumps. This pumping occurs in a manner similar to that by which the inert gases are pumped. That is, H2 is pumped in the walls of the anode cells by high energy neutral burial. Hydrogen in the pump walls and anodes limits the base pressure of the pump.
doi:10.1109/pac.1991.164936 fatcat:2yrjpjzqenhshd5tf43myld5ti