A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2018; you can also visit the original URL.
The file type is application/pdf.
Automatic Inspection of Foreign Particles on Patterned Sample by Means of Polarized Laser
偏光レーザーによるパターン付試料上の異物検査の自動化
1981
Transactions of the Society of Instrument and Control Engineers
偏光レーザーによるパターン付試料上の異物検査の自動化
Preserved Fulltext
