Design and Characterization of CMOS/SOI Image Sensors

Igor Brouk, Kamal Alameh, Yael Nemirovsky
2007 IEEE Transactions on Electron Devices  
The design, operation, and characterization of CMOS imagers implemented using: 1) "regular" CMOS wafers with a 0.5-µm CMOS analog process; 2) "regular" CMOS wafers with a 0.35-µm CMOS analog process; and 3) silicon-oninsulator (SOI) wafers in conjunction with a 0.35-µm CMOS analog process, are discussed in this paper. The performances of the studied imagers are compared in terms of quantum efficiency, dark current, and optical bandwidth. It is found that there is strong dependence of quantum
more » ... iciency of the photodiodes on the architecture of the image sensor. The results of this paper are useful for designing and modeling CMOS/SOI image sensors. Index Terms-CMOS integrated circuits, image sensors, photodiodes, silicon-on-insulator (SOI) technology.
doi:10.1109/ted.2006.890585 fatcat:femnfoxcnvcy7ooeroxujejkua