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Investigations on preferential orientation of tin oxide films were carried out under various conditions of film fabrication from the view point of the effect on sensing mechanism. The preferential orientation of (110) crys tallographic plane resulted in the increase of sensitivi ty for H2 gas. The observed relationship between the sensitivity and preferential orientation has been under stood by considering the maximum atomic density on the (110) plane, which ensures the large numbers of addoi:10.2109/jcersj.100.1165 fatcat:yskp2xuwzva2llhore42qcbqbe