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Large Tilt Angle Lorentz Force Actuated Micro-Mirror with 3 DOF for Optical Applications
2017
Proceedings (MDPI)
Preserved Fulltext
A versatile MEMS micro-mirror for optical platforms is presented, that operates using Lorentz force for actuation, resulting in low voltage operation. While maintaining below 20 mA drive current, this mirror has a tilting angle of over 50° and 20° around two diagonal axes and a linear motion of 1.5 mm in vertical axis. Compared to other works, it has larger angle of rotation and additional out of plane linear motion. The temperature rise on the mirror is kept bellow 25 °C to avoid thermal
doi:10.3390/proceedings1040351
fatcat:rwvp4ez7enajphratljncaqkee