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Piezoresistive cantilever designed for torque magnetometry
1998
Journal of Applied Physics
Preserved Fulltext
New piezoresistive silicon cantilevers designed specifically for torque magnetometry on microscopic samples have been microfabricated and tested. These levers have been optimized to detect the torque in two directions corresponding to flexion and torsion. Torque resolution of ϳ10 Ϫ14 N m can be achieved depending on the operating mode. In one version an integrated loop allows an absolute calibration of the device with an accuracy of ϳ1%. This loop can also be used to excite the lever
doi:10.1063/1.366811
fatcat:cx54x5lco5cddkcpy2zss4bey4