Fixturing Options for Atom Probe Tomography

Katherine Rice, Yimeng Chen, Robert Ulfig, Tsuyoshi Onishi
2020 Microscopy and Microanalysis  
Atom probe tomography (APT) is a powerful technique to obtain 3D compositional information on the nanoscale. As with many microscopy techniques, specimen preparation is critical to achieving highquality data and specimen yield. Strategies for focused ion beam (FIB) based atom probe specimen preparation were introduced in the early 2000's and its application has been broadened to accommodate various types of fixtures that allow correlative analyses [1, 2] . Correlative microscopy on APT
more » ... opy on APT specimens provides additional specimen characterization that can help target specific regions of interest during the specimen preparation process or inform the reconstructed data. Here we detail CAMECA's offerings to assist in FIB-based specimen preparation.
doi:10.1017/s1431927620022515 fatcat:rf2oxk5g45cnlgzw72he72igg4