Integrated On-Chip Inductors with Magnetic Films

Donald S. Gardner, Gerhard Schrom, Peter Hazucha, Fabrice Paillet, Tanay Karnik, Shekhar Borkar, Jason Saulters, Jordan Owens, Jeff Wetzel
2006 2006 International Electron Devices Meeting  
On-chip inductors with 2 levels of magnetic material were integrated into an advanced 130 nm CMOS process to obtain over an order of magnitude (>14×) increase in inductance and Q-factor, significantly greater than prior values of 2.3× for high frequency inductors. The magnetic material is shown to operate at frequencies beyond 6.4 GHz for 1 nH inductors. An amorphous CoZrTa alloy exhibiting high permeability, good high-temperature stability (>250°C), high saturation magnetization, low
more » ... iction, high resistivity, minimal hysteretic loss, and compatible with silicon technology was used in combination with magnetic vias and elongated structures that take advantage of the uniaxial magnetic anisotropy.
doi:10.1109/iedm.2006.347002 fatcat:riepw423mfhbzn3n53b5ynzkny