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Integrated On-Chip Inductors with Magnetic Films
2006 International Electron Devices Meeting
On-chip inductors with 2 levels of magnetic material were integrated into an advanced 130 nm CMOS process to obtain over an order of magnitude (>14×) increase in inductance and Q-factor, significantly greater than prior values of 2.3× for high frequency inductors. The magnetic material is shown to operate at frequencies beyond 6.4 GHz for 1 nH inductors. An amorphous CoZrTa alloy exhibiting high permeability, good high-temperature stability (>250°C), high saturation magnetization, lowdoi:10.1109/iedm.2006.347002 fatcat:riepw423mfhbzn3n53b5ynzkny