Equivalent circuit of a coaxial-line-based nozzleless microwave 915 MHz plasma source

R Miotk, M Jasiński, J Mizeraczyk
2016 IOP Conference Series: Materials Science and Engineering  
This paper presents a new concept of an equivalent circuit of a microwave plasma source (MPS) used for gas treatment. The novelty of presented investigations is the use of the Weissfloch circuit as equivalent of an area of waveguide discontinuity in the MPS which is a result of entering a coaxial-line structure. Furthermore, in this area the microwave discharge is generated. Verification of the proposed method was carried out. The proposed equivalent circuit enabled calculating the MPS tuning
more » ... ng the MPS tuning characteristics and comparing them with those measured experimentally. This process allowed us to determine the impedance Z P ofplasma in the MPS.
doi:10.1088/1757-899x/113/1/012008 fatcat:wesruainjng5tmdzs6vfmoki24