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MEMS deformable mirror actuators with enhanced reliability
2012
MEMS Adaptive Optics VI
Preserved Fulltext
MEMS deformable mirrors with thousands of actuators are under development for space-based operation, which require fault tolerant actuators that will not fail due to electrical overstress. We report on advances made in the development of MEMS deformable mirror actuators with enhanced reliability for space-based, high-contrast imaging instrumentation that eliminate irreversible actuator damage resulting from snap-through.
doi:10.1117/12.910742
fatcat:t4jaiyqoijbufi65dfagedivdm