Optical Methods Of Measuring Rough Surfaces

K. Leonhardt, K.-H. Rippert, H. J. Tiziani, Jean M. Bennett
1989 Surface Measurement and Characterization  
The statistical para~eters of surfaces to be measured for industrial applications vary over several orders of maqnitude. Surfaces with large slopes or edges are particularly difficult to be recorded. Some measuring methods developed in our laborato ry are compared and the range of applications are discussed .
doi:10.1117/12.949151 fatcat:q6oh7bjikfegzcshvl22myym5u