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High-G MEMS integrated accelerometer
1997
Smart Structures and Materials 1997: Smart Electronics and MEMS
This paper describes the design and implementation of a surface micromachined accelerometer for measuring very high levels of acceleration (up to 50,000 G). Both the mechanical and electronic portions of the sensor were integrated on a single substrate using a process developed at Sandia National Laboratories. In this process, the mechanical components of the sensor were first fabricated at the bottom of a trench etched into the wafer substrate. The trench was then filled with oxide and sealed
doi:10.1117/12.276628
fatcat:hzu3mhvhjvhbpnh452k7n6gd5u