Assessment of effective-medium theories of ion-beam sputtered Nb2O5–SiO2 and ZrO2–SiO2 mixtures

Tomas Tolenis, Mindaugas Gaspariūnas, Martynas Lelis, Artūras Plukis, Rytis Buzelis, Andrius Melninkaitis
2014 Lithuanian Journal of Physics  
Single-layer mixture coatings of ZrO 2 -SiO 2 and Nb 2 O 5 -SiO 2 produced by the ion beam sputtering (IBS) deposition technique were investigated in detail. Effective medium approximation (EMA) models and two non-optical methods, namely Rutherford backscattering spectroscopy (RBS) and X-ray photoelectron spectroscopy (XPS) were applied for characterization of elemental composition of these films. The comparison of obtained results indicates discrepancies in atomic material concentrations. The
more » ... oncentrations. The reasons and potential sources of such discrepancies are discussed qualitatively and indicate limitations of optical models.
doi:10.3952/lithjphys.54205 fatcat:gz2jeqsxzrfurgoaw2j4ywzdni