Origin of Trace Organic Contaminants Adsorbed on the Surface of Silicon Wafers in a Manufacturing Line

Hyun-Mee PARK, Young-Man KIM, Chan Seong CHEONG, Jae-Chun RYU, Dai Woon LEE, Kang-Bong LEE
2002 Analytical Sciences  
doi:10.2116/analsci.18.477 pmid:11999527 fatcat:jb2odl7l4jgupoagbaygyaakbm