Polydimethylsiloxane-integratable micropressure sensor for microfluidic chips

Limu Wang, Mengying Zhang, Min Yang, Weiming Zhu, Jinbo Wu, Xiuqing Gong, Weijia Wen
2009 Biomicrofluidics  
A novel microfluidic pressure sensor which can be fully integrated into polydimethylsiloxane ͑PDMS͒ is reported. The sensor produces electrical signals directly. We integrated PDMS-based conductive composites into a 30 m thick membrane and bonded it to the microchannel side wall. The response time of the sensor is approximately 100 ms and can work within a pressure range as wide as 0-100 kPa. The resolution of this micropressure sensor is generally 0.1 kPa but can be increased to 0.01 kPa at
more » ... h pressures as a result of the quadratic relationship between resistance and pressure. The PDMS-based nature of the sensor ensures its perfect bonding with PDMS chips, and the standard photolithographic process of the sensor allows one-time fabrication of three dimensional structures or even microsensor arrays. The theoretical calculations are in good agreement with experimental observations.
doi:10.1063/1.3230500 pmid:20216961 pmcid:PMC2835279 fatcat:y5em4fddqjfdjbw3yukp4a4pt4