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Polydimethylsiloxane-integratable micropressure sensor for microfluidic chips
2009
Biomicrofluidics
A novel microfluidic pressure sensor which can be fully integrated into polydimethylsiloxane ͑PDMS͒ is reported. The sensor produces electrical signals directly. We integrated PDMS-based conductive composites into a 30 m thick membrane and bonded it to the microchannel side wall. The response time of the sensor is approximately 100 ms and can work within a pressure range as wide as 0-100 kPa. The resolution of this micropressure sensor is generally 0.1 kPa but can be increased to 0.01 kPa at
doi:10.1063/1.3230500
pmid:20216961
pmcid:PMC2835279
fatcat:y5em4fddqjfdjbw3yukp4a4pt4