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A MICROMACHINED CHEMICAL SENSOR FOR SEA FLOOR ENVIRONMENTS: INITIAL RESULTS
2012 Solid-State, Actuators, and Microsystems Workshop Technical Digest
This paper reports a micromachined chemical sensor intended for harsh environments such as those near hydrothermal vents at the sea floor. The sensor is intended to measure the pH, dissolved H 2 and H 2 S, and temperature. The device is 12 mm in diameter and 6 mm in effective length, including packaging. A YSZ|HgO|Hg solid electrode is used as a common electrode for measurement of the three chemical quantities. The YSZ diaphragm used for this electrode is <500 µm thick, allowing sufficient iondoi:10.31438/trf.hh2012.46 fatcat:qtya2tra7rddhjmtnpcgoecxhi